Accelerometers

Accelerometers

Accelerometers have been fabricated based on TPoS resonator technology. Under an acting acceleration, a released proof mass applies a strain to the resonator body which results in a shift in frequency. This shift can be measured and correlated to the initial acceleration.

 

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Fig. 1 Overhead view of multi-axis accelerometer based on TPoS resonator strain. Picture taken with optical microscope.

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