TPoD Resonators

TPoD Resonators

TPoD stands for Thin-film Piezoelectric on Diamond. TPoD resonators are lateral-extensional resonators that incorporate a piezoelectric layer. By applying an electric field through the top and bottom electrodes, a stress field is produced in the bulk of the resonators causing it to vibrate laterally. The frequency of vibrations depends on the geometry of the resonator, as well as the elastic properties of the resonator substrate.

The superior adventage of diamond is the highest Young's modulus among all materials, so higher frequencies can be achieved with more fabrication ease. This project focuses on design and optimization of such high frequency resonators.

 

5th order tpod resonator

Structure of a 5th order TPoD resonator

 

5th order resonator-mode shape

5th over-tone of the strain filed in a TPoD resonator

 



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