pistole pete all gowned upOur cleanroom is located on the first floor of the Helmerich Advanced Research Center at OSU-Tulsa. It features a class-1000 characterization main hallway and three adjacent class-100 bays. The first bay is the lithography bay, the second one is vapor deposition systems, and the third one houses plasma processing tools. 





Helmerich Research Center: http://www.osu-tulsa.okstate.edu/helmerich/index.php

website under constructionCleanroom's website



Our lab has over 1200 square feet of work area and is outfitted with bench tops, fume hoods, and cabinet space throughout and is plumbed with compressed air, nitrogen, and water. This lab is our groups' primary site for post-fabrication device testing and peripheral circuit design/testing. We have many conventional supplies stationed here as well as more specialized equipments which are listed below. This lab is located in room 144 of the Helmerich Reseach Center.




Network Analyzers:dsc02832

Our lab offers two large bandwidth network analyzers, Agilent E8358A PNA Series 300Hz-9GHz and Agilent E5061A ENA Series 300kHz-1.5GHz. These are commonly used in tandem with the probe station to test the performance of TPoS and TPoD based resonators. The tool provides frequency response of the device as well as the S-parameters, return loss, and the quality factor.




    Agilent PNA Analyzer






                                                                                                                                                                  Agilent ENA Analyzer 



Probe Station:

A Suss Microtec EP 6 probe station is used as a testbed for device characterization. The station is supplied with two PH110 inline manipulators, GSG Z-probes, and cables to probe the device under test. Fabricated wafers (up to 150mm) are placed on the stage and the two probes are manually positioned onto the device electrodes. The probes can be connected to any tool (e.g. network analyzer). Pads as small as 50um*50um can be probed.





Vacuum Probe Station:vacuum probe station

Many of our devices also need to be tested in extreme temperature and/or vacuum environments. To accomplish this, the Janis vacuum system is employed which houses a vacuum chamber with probing capabilities.






Several multichannel oscilloscopes are available, both digital and analog including Tektronics models: 2252 100MHz, TDS5104B Digital 1GHz, and 2213 60MHz. These are proper tools for measuring time domain data such as jitter and voltage amplitude.


Tektronics TDS5104B 






Tektronics 2252


DC Power Supply:


A very powerful DC power supply with two independent outputs variable from -25V to +25V. This power supply can also be controlled with a computer through RS 232. 







Frequency Counter:

These are the key features of this counter that I copied from the Agilent's website.

  • RF Frequency Counter, 10 digits/s
  • One 225 MHz input channel, plus optional second channel up to 12.4 GHz
  • 10 digits/second resolution
  • GPIB Standard




Function Generator:

A capable function generator that works up to 15MHz. There are three different choices of waveforms, and an option to make the output asymmetric. 





Environmental Chamber:

This chamber is used to test your circuitry at different temperatures. The temperature can be varried from -80C to 500C. 





Spectrum Analyzer:

These are the key features of this spectrum analyzer: 

  • Internal or External Tracking-Generator Option
  • Internal Frequency Counter 
  • GPIB or RS-232 Interface Option
  • Excellent Frequency Accuracy and Sensitivity
  • 3-Control Operation for Most Measurements
  • UL Listed 1244, CSA Bulletin 556B

Frequency accuracy is 1 × 10-5 and sensitivity is up to -117 dBm (-70 dBmV) at 3 kHz RBW. The built-in preamp can add another 12 dB, up to -129 dBm (-82 dBmV). Up to 80-dB on-screen dynamic range helps detect weak signals, even when strong ones are present.



This Kulicke & Soffa wirebonder is used to connect our fabricated devices to external circuitry. It is a wedge type bonder and can use gold or aluminum wire to establish proper electrical connections. It is provided with a 5” stage, microscope and mechanical stage manipulators to obtain small area interconnects.







Parylene Coater:

Parylene deposition tool

Parylene is a polymer used as moisture and/or dielectric barrier. It is almost inert to all chemicals, so in MEMS fabrication, dry etching with oxygen plasma is the most common way to pattern these films.

PDS 2010 vacuum deposition system is the first portable system designed for deposition of protective Parylene conformal coating. 

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